JPH0139653B2 - - Google Patents
Info
- Publication number
- JPH0139653B2 JPH0139653B2 JP60037102A JP3710285A JPH0139653B2 JP H0139653 B2 JPH0139653 B2 JP H0139653B2 JP 60037102 A JP60037102 A JP 60037102A JP 3710285 A JP3710285 A JP 3710285A JP H0139653 B2 JPH0139653 B2 JP H0139653B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- board
- end surface
- substrate holding
- holding structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 89
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 238000003860 storage Methods 0.000 description 8
- 239000000428 dust Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- -1 etc. Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60037102A JPS61203383A (ja) | 1985-02-26 | 1985-02-26 | 基板保持構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60037102A JPS61203383A (ja) | 1985-02-26 | 1985-02-26 | 基板保持構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61203383A JPS61203383A (ja) | 1986-09-09 |
| JPH0139653B2 true JPH0139653B2 (en]) | 1989-08-22 |
Family
ID=12488219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60037102A Granted JPS61203383A (ja) | 1985-02-26 | 1985-02-26 | 基板保持構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61203383A (en]) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002225949A (ja) * | 2001-01-31 | 2002-08-14 | Asahi Kasei Corp | ガラス基板用緩衝材 |
| US7635544B2 (en) | 2004-09-13 | 2009-12-22 | Hoya Corporation | Transparent substrate for mask blank and mask blank |
| US7700244B2 (en) | 2004-09-16 | 2010-04-20 | Hoya Corporation | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method |
| US8496133B2 (en) | 2008-09-27 | 2013-07-30 | Hoya Corporation | Container for housing a mask blank, method of housing a mask blank, and a mask blank package |
| JP2017019506A (ja) * | 2015-07-07 | 2017-01-26 | トーホー工業株式会社 | 発泡容器 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0326768U (en]) * | 1988-11-16 | 1991-03-19 | ||
| JPH10231023A (ja) * | 1997-02-24 | 1998-09-02 | Matsushita Electric Ind Co Ltd | 基板搬送方法および基板搬送カセット |
| JP3967892B2 (ja) * | 2000-09-22 | 2007-08-29 | シャープ株式会社 | 薄形板状半導体部品の検査分類システム |
| KR102125579B1 (ko) * | 2012-06-28 | 2020-07-07 | 호야 가부시키가이샤 | 마스크 블랭크 수납 케이스 및 마스크 블랭크 수납체 |
| KR101963123B1 (ko) * | 2017-03-20 | 2019-07-31 | 주식회사 포미스 | 기판 이송용 흔들림 방지용 기판 수용부재 |
| KR20240148395A (ko) * | 2022-03-22 | 2024-10-11 | 미쯔이가가꾸가부시끼가이샤 | 펠리클 포장체 및 펠리클 수용체 |
-
1985
- 1985-02-26 JP JP60037102A patent/JPS61203383A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002225949A (ja) * | 2001-01-31 | 2002-08-14 | Asahi Kasei Corp | ガラス基板用緩衝材 |
| US7635544B2 (en) | 2004-09-13 | 2009-12-22 | Hoya Corporation | Transparent substrate for mask blank and mask blank |
| US7700244B2 (en) | 2004-09-16 | 2010-04-20 | Hoya Corporation | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method |
| US7998644B2 (en) | 2004-09-16 | 2011-08-16 | Hoya Corporation | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method |
| US8318388B2 (en) | 2004-09-16 | 2012-11-27 | Hoya Corporation | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method |
| US8496133B2 (en) | 2008-09-27 | 2013-07-30 | Hoya Corporation | Container for housing a mask blank, method of housing a mask blank, and a mask blank package |
| JP2017019506A (ja) * | 2015-07-07 | 2017-01-26 | トーホー工業株式会社 | 発泡容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61203383A (ja) | 1986-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |